


| 매개변수 | 가치 |
|---|---|
| 목 | Specifications |
| 무게 | 410 g approx. |
| 세부 | Atmospheric side and vacuum side are isolated. |
| 누출 | 1.0 x 10-10Pa·m3/s [He] or less (* Measured with a He detector) |
| 제품 | Vacuum-resistant flange 4CH |
| 재료 | Main unit: Stainless steel (SUS303), Holding bracket: Stainless steel (SUS301),Fiber: Quartz glass, O-ring: Fluororubber |
| 오링 사이즈 | V40 |
| 부품 번호 | FV-FR4 |
| 제품명 | One-Touch Connection System Vacuum-resistant Fibers |
| 제품 번호 | FV-FR4 |
| 주변 습도 | 35 to 85% RH (Same for storage) |
| 인장 강도 | 20 N or less (Atmospheric / vacuum side fiber joint) |
| 적용 가능한 섬유 | FT-40V, FD-KZ50V, FD-L10V, FT-J9 |
| 조임 토크 | 9.8 N·m or less (M8 screw) |
| 주변 온도 | -30 to +120℃-22 to +248℉(Same for storage. Up to +40 ℃+104℉when humidity is high. However, no dew condensation or icing allowed.) |
| 진공 챔버 벽의 권장 두께 | 3.0 mm0.118 inor more(Note) : If the vacuum chamber wall is too thick, the FV-FR4 may not be able to connect to the vacuum side fiber. In that case, connect the FV-FR4 to the vacuum side fiber before the installation. |
기술 사양 및 성능 데이터
설치 및 운영 가이드